Experimental Setup for Dynamic Analysis of Micro- and Nano-Mechanical Systems in Vacuum, Gas, and Liquid
van den Brink, Bram, Alijani, Farbod, Ghatkesar, MuraliТом:
10
Журнал:
Micromachines
DOI:
10.3390/mi10030162
Date:
February, 2019
Файл:
PDF, 24.54 MB
2019