Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity
Christophe Hecquet, Franck Delmotte, Marie-Françoise Ravet-Krill, Sébastien de Rossi, Arnaud Jérome, Françoise Bridou, Françoise Varnière, Evgueni Meltchakov, Frédéric Auchère, Angelo Giglia, Nicola MТом:
95
Мова:
english
Сторінки:
8
DOI:
10.1007/s00339-009-5082-9
Date:
May, 2009
Файл:
PDF, 598 KB
english, 2009