Investigation of high transparent and conductivity of IGZO/Ag/IGZO sandwich structures deposited by sputtering method
Yuan, Zhan-Sheng, Wu, Chia-Ching, Tzou, Wen-Cheng, Yang, Cheng-Fu, Chen, Yu-HsinТом:
165
Мова:
english
Журнал:
Vacuum
DOI:
10.1016/j.vacuum.2019.04.030
Date:
July, 2019
Файл:
PDF, 2.14 MB
english, 2019