[IEEE 2019 19th International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2019.6.6-2019.6.7)] 2019 19th International Workshop on Junction Technology (IWJT) - Pre-Amorphization Implants and in-situ Surface Preparation Optimization for Low Co-Silicided Area Density
Borrel, Julien, Gregoire, Magali, Ghegin, Elodie, Joblot, Sylvain, Vallat, Remi, Valery, Alexia, Juhel, Marc, Bianchi, Raul-AndresРік:
2019
Мова:
english
DOI:
10.23919/IWJT.2019.8802887
Файл:
PDF, 657 KB
english, 2019
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