Numerical Study of Heating Structure in Cold-Wall MOCVD Reactor by Induction Heating
Zhao, Lili, Li, Zhiming, Zhang, Jincheng, Lu, Ligen, Guo, Yunqiu, Feng, LanshengТом:
490
Мова:
english
Журнал:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/490/4/042050
Date:
April, 2019
Файл:
PDF, 198 KB
english, 2019
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