Piezoelectricity and biocompatibility of flexible ScxAl(1-x)N thin films for compliant MEMS transducers
Algieri, Luciana, Todaro, Maria Teresa, Guido, Francesco, Blasi, Laura, Mastronardi, Vincenzo Mariano, Desmaele, Denis, Qualtieri, Antonio, Giannini, Cinzia, Sibillano, Teresa, De Vittorio, MassimoМова:
english
Журнал:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.0c00552
Date:
March, 2020
Файл:
PDF, 1.10 MB
english, 2020