Digitally Alloyed Modulated Precursor Flow Epitaxial Growth of Ternary AlGaN with Binary AlN and GaN Sub-Layers and Observation of Compositional Inhomogeneity
Hee Jin Kim, Suk Choi, Dongwon Yoo, Jae-Hyun Ryou, Michael E. Hawkridge, Zuzanna Liliental-Weber, Russell D. DupuisТом:
39
Мова:
english
Сторінки:
7
DOI:
10.1007/s11664-010-1098-3
Date:
May, 2010
Файл:
PDF, 487 KB
english, 2010