Development of a calculation method of the main parameters of the multistage turbomolecular pump
Gordeeva, U S, Demikhov, K E, Ochkov, A AТом:
781
Журнал:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/781/1/012010
Date:
May, 2020
Файл:
PDF, 395 KB
2020