Photoluminescence mapping of the strain induced in InP and GaAs substrates by SiN stripes etched from thin films grown under controlled mechanical stress
Gérard, Solène, Mokhtari, Merwan, Landesman, Jean-Pierre, Levallois, Christophe, Fouchier, Marc, Pargon, Erwine, Pagnod-Rossiaux, Philippe, Laruelle, François, Moréac, Alain, Ahammou, Brahim, CassТом:
706
Журнал:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.138079
Date:
July, 2020
Файл:
PDF, 2.18 MB
2020