Analysis of a nano positioning actuator using a numerical method combined with a analytic method
Rho, Jong-Seok, Kwak, Sang-Yeop, Chung, Tae-Kyung, Jung, Hyun-KyoТом:
28
Журнал:
International Journal of Applied Electromagnetics and Mechanics
DOI:
10.3233/jae-2008-945
Date:
October, 2008
Файл:
PDF, 903 KB
2008