Mechanical properties of homogeneous and nitrogen graded TiN thin films
Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Fontana, Luis C., de Lima, Nelson B., Schön, Cláudio G.Том:
710
Журнал:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.138268
Date:
September, 2020
Файл:
PDF, 1.07 MB
2020