Bound oxygen influence on the phase composition and electrical properties of semi-insulating silicon films
Terekhov, Vladimir A., Nesterov, Dmitriy N., Barkov, Konstantin A., Domashevskaya, Evelina P., Konovalov, Aleksandr V., Fomenko, Yuriy L., Seredin, Pavel V., Goloshchapov, Dmitry L., Popov, Anatoliy IТом:
121
Журнал:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105287
Date:
January, 2021
Файл:
PDF, 3.19 MB
2021
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