International Journal of Advances in Engineering Sciences and Applied Mathematics
2010 / 06 Vol. 2; Iss. 1-2
The effect of evacuated backside cavity on the dynamic characteristics of a capacitive micromachined ultrasonic transducer
Babar Ahmad, Rudra PratapТом:
2
Мова:
english
Сторінки:
5
DOI:
10.1007/s12572-010-0015-6
Date:
June, 2010
Файл:
PDF, 439 KB
english, 2010