Stealth dicing of sapphire sheets with low surface roughness, zero kerf width, debris/crack-free and zero taper using a femtosecond Bessel beam
Li, Zhaoqing, Wang, Xuefeng, Wang, Junlong, Allegre, Olivier, Guo, Wei, Gao, Wenyan, Jia, Nan, Li, LinТом:
135
Журнал:
Optics & Laser Technology
DOI:
10.1016/j.optlastec.2020.106713
Date:
March, 2021
Файл:
PDF, 7.62 MB
2021