Comparison of Cavities Formed in Single Crystalline and Polycrystalline α-SiC after H Implantation
Liao, Qing, Kang, Long, Zhang, Tong-Min, Liu, Hui-Ping, Wang, Tao, Li, Xiao-Gang, Li, Jin-Yu, Yang, Zhen, Li, Bing-ShengТом:
37
Журнал:
Chinese Physics Letters
DOI:
10.1088/0256-307X/37/7/076102
Date:
July, 2020
Файл:
PDF, 2.40 MB
2020