Area-Selective Atomic Layer Deposition Patterned by Electrohydrodynamic Jet Printing for Additive Manufacturing of Functional Materials and Devices
Cho, Tae H., Farjam, Nazanin, Allemang, Christopher R., Pannier, Christopher P., Kazyak, Eric, Huber, Carli, Rose, Mattison, Trejo, Orlando, Peterson, Rebecca L., Barton, Kira, Dasgupta, Neil P.Журнал:
ACS Nano
DOI:
10.1021/acsnano.0c07297
Date:
November, 2020
Файл:
PDF, 5.48 MB
2020