[IEEE 2020 33rd International Vacuum Nanoelectronics Conference (IVNC) - Lyon, France (2020.7.6-2020.7.10)] 2020 33rd International Vacuum Nanoelectronics Conference (IVNC) - Silicon Field Emitters fabricated by Dicing-Saw and TMAH-Etch
Edler, Simon, Biba, Josef, Hansch, Walter, Bachmann, Michael, Dusberg, Felix, Langer, Christoph, Schels, Andreas, Werber, Marinus, Pahlke, AndreasРік:
2020
DOI:
10.1109/ivnc49440.2020.9203262
Файл:
PDF, 2.92 MB
2020
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