The Carbon Co-implant with Spike RTA Solution for Phosphorus Extension
Pawlak, Bartek, Duffy, Ray, Augendre, Emmanuel, Severi, Simone, Janssens, Tom, Absil, Philippe, Vandervorst, Wilfried, Collart, Erik, Felch, Susan, Schreutelkamp, Robert, Cowern, NickТом:
912
Мова:
english
Журнал:
MRS Proceedings
DOI:
10.1557/PROC-0912-C01-06
Date:
January, 2006
Файл:
PDF, 121 KB
english, 2006